| 摘要 |
A multistage stage deformable mirror structure (10) includes a backup structure (12) having a support surface; a single mirror facesheet (18) having an optical surface (18A); and, interposed between the support surface and the optical surface, at least one intermediate deformable structure (14) that is coupled at a first surface to the support surface through a first set of linear actuators (16) for being deformed by the set first set of actuators. The at least one intermediate deformable structure is also coupled at a second opposing surface to the optical surface through a second set of linear actuators (20) for deforming the optical surface. The optical surface assumes a shape that is a combination of the deformation imparted to the at least one intermediate deformable structure by the first set of linear actuators, and the deformation imparted to it by the second set of linear actuators. The first set of linear actuators have a wider dynamic range than the second set of linear actuators, and the optical surface is deformed so as to simultaneously compensate an incident wavefront for both large and small magnitude and low and high temporal and spatial frequency wavefront errors. The first set of linear actuators operate with a lower bandwidth, and are spaced at wider intervals, than the second set of linear actuators.
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