SEMICONDUCTOR MICROVALVE

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor microvalve having good drivability. SOLUTION: The semiconductor microvalve includes a valve element 4 displaced when the flexible part 3 of a second board 2 deflects and a valve seat 7a positioned at the periphery of an oversurface opening 7b in a through hole 7 formed in the first board 1 and the distance between the seat 7a and the undersurface 4a of the valve element 4 is changed to adjust the rate of flow of the fluid flowing in the through hole 7. The first 1 and second boards 2 are joined together with a buffer layer 10 interposed.