METHOD FOR MANUFACTURING POLYCRYSTALLINE THIN FILM USING MICROWAVE

摘要

PURPOSE: A method for manufacturing a polycrystalline thin film using microwave is provided to reduce a manufacturing cost of a products by crystallizing an amorphous thin film in a solid state using a microwave to reduce a crystallize temperature and to short a crystallize time. CONSTITUTION: A substrate is cleaned and loaded into a deposition apparatus, and is preheated. An amorphous or a fine amorphous thin film is deposited on the substrate using an LPCVD or a PECVD. An electrical property or a crystal state of the thin film is changed in a solid state by implanting an impurity into the thin film or adsorbing a metal into the thin film. A polycrystalline thin film is formed by heat treating and crystallizing using a microwave at 400-600°C during 2-5 hours.