发明名称 Zener zapping device and zener zapping method
摘要 An object of the invention is to obtain a Zener zapping device which can reduce the time required for Zener-zapping and the scale of the device. A voltage setting circuit has a terminal (1), a current source (2) having its one end grounded, a Zener diode (ZD, 6a) having its one end connected to the terminal (1) and the other end of the current source (2), a resistor (5a) having its one end connected to the terminal (1), a relay (7a) having its one end connected to the other end of the current source (2), a ZD (6b) having its one end connected to the other end of the resistor 5a, the other end of the ZD (6a), and the other end of the relay (7a), a resistor (5b) having its one end connected to the other end of the resistor (5a) and the other end of the ZD (6a), a relay (7b) having its one end connected to the other end of the ZD (6a) and the other end of the relay (7a), a ZD (6c) having its one end connected to the other end of the resistor (5b), the other end of the ZD (6b), and the other end of the relay (7b), and its other end grounded, a resistor (5c) having its one end connected to the other end of the resistor (5b) and the other end of the ZD (6b), and its other end grounded, and a relay (7c) having its one end connected to the other end of the ZD (6b) and the other end of the relay (7b), and its other end grounded.
申请公布号 US6236547(B1) 申请公布日期 2001.05.22
申请号 US19990352874 申请日期 1999.07.13
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 YAMAMOTO MASAHIRO
分类号 H01L21/82;G01R31/26;G05F3/18;H01L29/861;(IPC1-7):H02H9/00 主分类号 H01L21/82
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