APPARATUS FOR ROTATING WORK FOR THIN FILM DEPOSITION

摘要

Each carrier in a plurality of tiers of hoop-like carriers for individual silicon wafers is rotated about its own translating axis as the carrier is orbited about a central source of evaporant material. Carrier support means includes at least a three track system. The tracks are vertically spaced from one another and horizontally disposed about a common axis. Each carrier is supported on a lower track and rests on the next upper track. Rotation of either track of a cooperating pair imparts the compound motion.