| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an apparatus and a method for the reinspection of a defect on an object. SOLUTION: This apparatus comprises a stage 414 on which an object is placed so as to be received. The apparatus comprises both an optical microscope 416 and a scanning electron microscope(SEM) 420. The optical microscope is used to reinspect a defect which is mapped in advance on the surface of the object, and it comprises an illumination source 430 used to guide a light beam toward a part which is selected on the surface of the object. The optical microscope is constituted so as to generate either bright field illumination or dark field illumination or both. When the defect is detected once, a translational system 422 moves the stage by a prescribed displacement in such a way that the defect reaches a position which is reinspected by the SEM. The apparatus is constituted in such a way that the defect is focused automatically so as to be reinspected by the SEM and that the stage is turned so as to obtain a perspective in which the defect is changed.</p> |
