| 摘要 |
PROBLEM TO BE SOLVED: To provide good quality and productivity with a high yield and small variation, by carrying out an elimination process of binder and an annealing process for a laminated green chip element effectively in a short time. SOLUTION: Base-metal inner electrode connected to an outer electrode and a barium titanate-based dielectric layer are laminated in a multi-layered state alternately to form a laminated green chip element. A laminated chip element as a sintered body is obtained from the laminated green chip element by carrying out a step of burning step for reducing the dielectric layer in an atmospheric chamber under low oxygen partial pressure after an elimination process of binder, a step for cooling the laminated green chip element, and an annealing step for oxidizing the dielectric layer in the atmospheric chamber under weak oxidizing partial pressure in a cooling temperature range. In this case, the laminated green chip elements (C) are arranged on the flat face of a carriage tray 1 one by one not overlapped with each other, and the laminated green chip elements (C) is carried to a furnace 2 by a unit of the tray 1, and treated directly to each process.
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