PATTERN FORMING LAMINATED FILM, METHOD FOR PRODUCING SAME AND PATTERN FORMING METHOD USING SAME

摘要

PROBLEM TO BE SOLVED: To produce a pattern forming laminated film and to provide a pattern forming method using the film. SOLUTION: A thermic ray sensitive resin film layer (A), a sheet layer (B) transparent to thermic rays, a thermic ray shielding layer (C) capable of forming a pattern with a developing solution and an energy beam sensitive film layer (D) are successively laminated on the surface of a substrate to obtain the objective pattern forming laminated film.