| 摘要 |
PROBLEM TO BE SOLVED: To suppress the generation of a vibration in an inspection means and to appropriately inspect a fine pattern with a high resolution. SOLUTION: In this image pickup lens switching mechanism 100, a lens mounting part 104 for which a first image pickup lens 101 and a second image pickup lens 102 are disposed on a moving table 103 is moved over a first position where the first image pickup lens 101 matches with an optical axis L, and a second position 102 where the second image pickup lens 102 matches with the optical axis L. Positioning is held at the first position and the second position by performing pressing to a first stopper 113 by a first pressurizing member 115, or to a second stopper 116 by a second pressurizing member 118 in the state of being separated from a cam 110 so as not to transmit the vibration of a stepping motor 109.
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