| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser microscope capable of securing a desired length measurement accuracy by turning the pixel size of a CCD element or the size of a light spot to the size for providing at least about four pixels at all times for one edge of a fine cycle structure to be an object. SOLUTION: In this laser microscope provided with a two-dimensional scanner unit 25 for two-dimensionally scanning the fine cycle structure formed on a sample 23 by the light of a prescribed spot 29, a photodetector 30 for outputting electric signals corresponding to the light intensity of the image of the sample 23 captured through a pinhole 28a, and an optical image system 40 for detecting the edge of the fine cycle structure by an image processing based on the electric signals outputted from the photodetector 30 and measuring the length of the fine cycle structure with a pixel for constituting the image as a unit, a scanner control part 35 controls the two-dimensional scanner unit 25 so as to turn the diameter of the spot 29 of the light for scanning the sample 23 to the size capable of allocating at least four pixels or more to the edge.
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