IMPEDANCE MATCHING DEVICE

摘要

PROBLEM TO BE SOLVED: To realize high impedance matching accuracy even in the case of use at a high frequency for an impedance matching device that matches the input impedance with the output impedance by adjusting the inductance of a matching coil provided to a matching circuit placed between the input and the output sides. SOLUTION: A matching coil of a matching circuit 5a is formed by connecting a coil L (matching variable element Z2) whose inductance can be changed stepwise by a relay in series with the secondary coil of a transformer 13 the inductance of the secondary coil of which can be varied by changing the resistance of the primary coil. A matching means 3a adjusts the inductance of the matching coil on the basis of the result of detection from an impedance error detector 1 to match the input side (impedance Za) with the output side (impedance Zb).