| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic heater having both superior folding endurance and durability and a glow plug equipped with the heat as a heating source, etc. SOLUTION: A ceramic heater is provided with a substrate composed of a sintered silicon nitride material and an exothermic resistor buried in the substrate and a glow plug is equipped with the heater. The resistor contains <=0.2 wt.% Fe. The exothermic resistor is constituted of a conductive component composed of WC, MoSi2, TiN, etc., and an insulating component composed of a sintered silicon nitride material. The Fe content of the conductive component is <=0.3 wt.%. In the heater, the sinterability of the raw material of the sintered silicon nitride material is not damaged. When the conductive component is composed of WC, particularly, the folding endurance, durability, etc. of the heater can be improved further by controlling the Fe content of the conductive component to <=0.05 wt.%.
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