| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method of a modulator integrated semiconductor laser wherein a semiconductor laser and an optical modulator are integrated by using butt joint. SOLUTION: This manufacturing method consists of a process for growing a first optical confining layer 13, an active layer 14 of a laser and a second optical confining layer 15 on a semiconductor substrate, a process for eliminating parts of these layers by etching using a patterned insulating film as a mask, a process for growing an optical modulator in such a manner that the active layer 14 of the laser and a light absorbing layer 16 are subjected to butt joint by using a selective semiconductor crystal growth method, and a process for forming a means for injecting a current in the light absorbing layer which is a part of the optical modulator and whose energy gap in the vicinity of the butt joint part is narrowed.</p> |
