| 摘要 |
PROBLEM TO BE SOLVED: To provide a dielectric barrier lamp unit, that can irradiate UV-rays uniformly on an object to be processed and expanding its area, and easily cope with the size of the object to be processed. SOLUTION: This dielectric barrier discharge lamp unit has a construction such that dielectric barrier discharge lamps are disposed in a housing case tightly closed by a side wall extending lengthwise and end walls provided at the both ends of the sidewall, a part of the sidewall has become a window to transmit light irradiated from the dielectric barrier discharge lamp, end walls of the housing case forms a passage to flow a gas to make interior of the housing case into an inert state and concurrently works as doors to take the lamp in and out, and a plurality of housing cases arranged in line so that their windows turn to objects to be processed.
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