发明名称 |
METHOD AND APPARATUS FOR BALL TRANSFER |
摘要 |
PROBLEM TO BE SOLVED: To transfer just required number of balls to the electrode pads of a wiring board or a semiconductor chip. SOLUTION: The apparatus for transferring balls 6 to electrode pads 71 on a substrate 7 comprises a ball arranging pallet 4 having pits 41 for arranging balls 6 formed at the positions corresponding to the electrode pads 71, a ball suction plate 3 having suction pits 31 corresponding to the arranging pits 41 formed in the ball arranging pallet 4, and a suction head base 2 connected with the ball suction plate 3 and having a suction hole 22 and an evacuation channel 23 for evacuating from the suction pits 31.
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申请公布号 |
JP2001135660(A) |
申请公布日期 |
2001.05.18 |
申请号 |
JP19990311866 |
申请日期 |
1999.11.02 |
申请人 |
NEC CORP;JAPAN EM KK |
发明人 |
TAKAHASHI NOBUAKI;SENBA NAOHARU;SHIMADA YUZO;YAMAMOTO TAKUMI;FUTAGAMI KAZUHIKO;HATASE AKIRA |
分类号 |
H01L21/60;H05K3/34;(IPC1-7):H01L21/60 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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