| 摘要 |
PROBLEM TO BE SOLVED: To provide a tilting stage which is compact in comparison with a conventional one, and capable of minimizing surface oscillation of the stage in in-plane rotation of the stage in a horizontal state, and reducing the manufacturing cost to approximately one half by simplifying the shape of components. SOLUTION: This tilting stage comprises a first moving stage 2 pressed and moved by the rotation of a motor 1, a tilting shaft 5 engaged with the first moving stage 2 at its one end and fixing a spherical body 11a at the other end, a stage base 19 provided with a spherical seat 11b for sliding the spherical body 11a, and a sample table 18 fixed to the tilting shaft 5 with the spherical body 11a, the first moving stage 2 is pressed and moved by the rotation of the motor 1, and the tilting shaft 5 is rotated and tilted along the spherical seat 11b for tilting the sample table 17.
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