发明名称 CAPACITOR AND MANUFACTURING METHOD FOR THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a technology where an upper part electrode easily covers a dielectrics layer well. SOLUTION: A high-dielectric layer 9 is formed on a pair of lower part electrodes 8, over which an upper part electrode material 10b is formed. Since the groove formed with the upper part electrode material 10b is filled with an insulator 201, a second layer 202, which covers the upper part electrode material 10b, is formed satisfactorily in terms of covering characteristics.
申请公布号 JP2001135800(A) 申请公布日期 2001.05.18
申请号 JP19990316634 申请日期 1999.11.08
申请人 MITSUBISHI ELECTRIC CORP 发明人 KASHIWABARA KEIICHIROU
分类号 H01L27/108;H01L21/8242 主分类号 H01L27/108
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