FREQUENCY RESOLUTION SENSOR

摘要

PROBLEM TO BE SOLVED: To improve the precision of frequency resolution by efficiently propagating a vibration to an oscillator, and easily and precisely converting the vibration into an electric signal. SOLUTION: This sensor comprises a diaphragm 11 for receiving an acoustic wave or mechanical vibration to generate a vibration, a vibration propagation part 12 for propagating the vibration from the diaphragm 11 in one direction; a plurality of oscillators 12 having different natural frequencies, which are extended from one side of the vibration propagation part so as to make their ends free, and arranged in the vibration propagating direction of the vibration propagation part; a plurality of extension parts 14 extended from the other side conformed to each oscillator of the vibration propagation part to fix their ends to a substrate 15, and arranged in the vibration propagating direction of the vibration propagation part; and a piezo resistive element 16 arranged extending over each extension part and a board 15. The resistance change of the piezo resistive element 16 according to the vibration of the oscillator is vibrated and individually taken out.