发明名称 |
MANUFACTURING METHOD OF PIEZOELECTRIC OR FERRODIELECTRIC THIN FILM |
摘要 |
PROBLEM TO BE SOLVED: To resolve the controlling difficulty of the crystalline orientation of a piezoelectric thin film, when forming it on a substrate by a sol-gel method. SOLUTION: In the forming process of the precursor of a ceramic thin film, its heating is stopped simultaneously with the elimination of its organic components. |
申请公布号 |
JP2001135876(A) |
申请公布日期 |
2001.05.18 |
申请号 |
JP19990312931 |
申请日期 |
1999.11.02 |
申请人 |
SEIKO EPSON CORP |
发明人 |
TAMURA HIROAKI;HASEGAWA KAZUMASA |
分类号 |
H01L41/39;B01J19/00;C03C17/25;C03C17/36;C04B35/49;C04B35/491;C30B1/02;H01B3/12;H01L41/318;H01L41/319 |
主分类号 |
H01L41/39 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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