| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a chemical, for the detection of an exciton, in which whether the exciton is generated or not inside an atmosphere used to form a film or the like can be monitored directly. SOLUTION: In a film formation apparatus 1, a diacetylene derivative monomer 3 is arranged inside a chamber 10 as a detecting chemical, and a film formation operation is started. When an electron beam radiated from an electron beam device used to heat and evaporate an evaporation material 11, ions which are excited by atoms or molecules evaporated from the evaporation material 11 or an exciton such as a plasma or the like are generated inside the chamber 10, the diacetylene derivative monomer 3 which is colorless causes a polymerization reaction so as to be changed into a polydiacetylene derivative which is blue or red. As a result, when such a hue change is moniotred from a monitoring window 15, the generation of an exciton 2 can be detected easily.
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