发明名称 LASER PLOTTING DEVICE HAVING MULTI-HEAD SCANNING OPTICAL SYSTEM
摘要 PROBLEM TO BE SOLVED: To highly accurately align plotting stat positions by highly accurately synchronizing two polygon mirrors of a laser plotting device. SOLUTION: This laser plotting device is equipped with 1st and 2nd polygon mirrors 41 and 42. A laser beam is outputted by an argon laser generator 10, distributed to two laser beams LB1 and LB2 by a distributing means 20, and deflected and made to scan a body to be plotted 72 by the mirrors 41 and 42. A polygon mirror synchronizing control part 60 highly accurately synchronizes the mirrors 41 and 42 based on the detected result on the origins 41a and 42a of the mirrors 41 and 42. After synchronizing them, a specified circuit pattern is plotted on the surface of the body 72 by scanning with the laser beams LB1 and LB2 while moving the body 72 in a subscanning direction.
申请公布号 JP2001133710(A) 申请公布日期 2001.05.18
申请号 JP19990315589 申请日期 1999.11.05
申请人 ASAHI OPTICAL CO LTD 发明人 OKUYAMA TAKASHI
分类号 H04N1/113;G02B26/10;G02B26/12;G03F7/20;H04N1/23;(IPC1-7):G02B26/10 主分类号 H04N1/113
代理机构 代理人
主权项
地址