发明名称 WORKING APPARATUS
摘要 PROBLEM TO BE SOLVED: To prevent a working apparatus from failing by quickly detecting the leak of a working water through a hole made in a bellows for blocking the working water from penetrating into the working apparatus for applying various kinds of working to a work held with a holder means when being fed with the working water and operated by actions of working means. SOLUTION: The working apparatus is composed of at least a means for holding a work, a means for working the work held with the holding means with a working water being fed, and a bellows for guiding the fed working water to a drain passage. Further, the apparatus comprises a water leak detecting layer 63 incorporated in corrugated parts of the bellows so as to quickly detect the water leak.
申请公布号 JP2001135593(A) 申请公布日期 2001.05.18
申请号 JP19990313590 申请日期 1999.11.04
申请人 DISCO ABRASIVE SYST LTD 发明人 SEKIYA KAZUMA
分类号 B23Q11/00;H01L21/301;H01L21/304;(IPC1-7):H01L21/301 主分类号 B23Q11/00
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