INTEGRATED SEMICONDUCTOR INERTIA SENSOR HAVING MICROACTUATOR

摘要

PROBLEM TO BE SOLVED: To form an integrated semiconductor inertia sensor having a calibration microactuator. SOLUTION: An inertia sensor of this invention is a sensor integrated inside a body of semiconductor material, and comprises a stator element and a rotor element united into one electrostatically. The rotor element of the inertia sensor comprises a moving body and a microactuator means integrated inside the body of semiconductor material. The microactuator means is connected to the moving element of the rotor element, or is on the same plane.