| 摘要 |
PROBLEM TO BE SOLVED: To provide a treatment chamber for treating a stripe-shaped work such as a lead frame efficiently, or the like, and a facility unit for carrying in and out the work inside and outside the treatment chamber with a high index. SOLUTION: A loader-side intermediate stage 11 for retaining the same number of, plurality of works 1 as the works 1 being treated in a treatment chamber 2 in parallel and an unloader-side intermediate stage 12 are arranged at both sides of the treatment chamber 2 for simultaneously treating the plurality of works 1 in parallel so that they can be reciprocated and moved in a work parallel arrangement direction, the plurality of works 1 are supplied to the loader-side intermediate stage 11 one by one at a waiting time zone where work treatment operation is being made in the treatment chamber 2, the works that have already been treated are taken out one by one from the unloader-side intermediate stage 12, and a plurality of works are collectively carried in and out between both the intermediate stages 11 and 12 and the treatment chamber 2 when the work treatment is completed in the treatment chamber 2.
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