METHOD OF PRODUCING OPTICAL MASTER DISK, OPTICAL MASTER DISK, STAMPER, AND SUBSTRATE FOR OPTICAL DISK

摘要

PROBLEM TO BE SOLVED: To provide a method of producing an optical master disk which makes high-density recording possible and which shows no rough state of the surface. SOLUTION: The method of producing an optical master disk includes a lamination process to laminate at least a mask layer 12 the transmittance of which increases when the intensity of irradiation light L1 increases and a photoresist layer 16 in this order on a transparent substrate 10, an exposure process to expose the photoresist layer through the mask layer by turning on and off the irradiation light through the transparent substrate according to the information to be recorded, and a development process to develop the photoresist layer to form a pattern of recesses and projections on the surface. Thus, the obtained optical master disk makes high-density recording possible and has no rough state of the surface.