| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a transfer control method and an electronic device manufacturing apparatus which is capable of successively transferring substrate, without recovering all substrates remaining in the apparatus, if substrate-changing operation is interrupted due to a trouble during the substrate-changing operation, thereby improving the throughput. SOLUTION: A controller 6 is provided, which stores in a memory position information of substrates held with a carry-in means 7 and a carry-out means 7 detected before a changing operation of substrates, and compares at restart, if a trouble which occurred during the substrate-changing operation, the position information of substrate held with the carry-in means 7 and the carry-out means 7 detected at restart with the position information stored in the memory, and transfers the position information of substrates held with the carry-in means 7 and the carry-out means 7 between a transfer chamber 3 and a load lock chamber 2 or the transfer chamber 3 and treatment chambers 1a-1dd or deletes the information, so that the next substrate-changing operation can be executed successively.</p> |
