| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent positioning error only by a clamp safety lug by providing an optical sensor at a table at the top end side of a tray, and detecting the positioning of 0.1 millimeter with the optical sensor. SOLUTION: In this method and device for detecting a tray alignment position, the movement of a detection pin to which a tray 7 is butted is detected by an optical sensor 19 arranged at a position opposite to a clamp safety lug 3 of a table 1 so that the clamp error of the clamp safety lug 3 can be covered, and that highly precise clamp can be operated.</p> |
