| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a ceramic base material, which can improve temperature controllability and temperature uniformity of a ceramic heater, when the heater is made of the material. SOLUTION: A ceramic base material is provided with a temperature control means on or in a ceramic plate, and at the same time, with thermocouples arranged in a substrate. Each thermocouple is constituted by jointing two different kinds of metallic wires to each other in a sheath, with the size of the joint being adjusted to the diameter of the element wire of the metal wire or larger, and to <=0.5 mm.</p> |
