| 摘要 |
PROBLEM TO BE SOLVED: To provide a transparent electrode using a zinc oxide-based material featured by high plasma resistance and low cost and having a reduced specific resistance and improved other characteristics including thermal oxidation resistance, as compared with a transparent electrode composed only of zinc oxide. SOLUTION: This transparent electrode comprises a zinc oxide layer containing at least two elements selected from group III of the periodic table, such as aluminum or gallium. Assuming that any specified two types of at least two elements are an additional element 1 and an additional element 2, respectively, the concentration of the additional element 1 on one surface or in the vicinity of the zinc oxide layer is higher than the concentration of the additional element 2, and the concentration of the additional element 2 on the opposite face to or in the vicinity of the zinc oxide layer is higher than the concentration of the additional element 1.
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