| 发明名称 |
REFLECTOR ASSEMBLY FOR REFLECTING THE VAPORS OF HIGH TEMPERATURE VOLATILE MATERIALS |
| 摘要 |
A vapor reflector assembly disposed in a vapor deposition chamber comprises a thin, fluorinated resin film coated onto a support body and means to heat said film to an elevated temperature.
|
| 申请公布号 |
US3678889(A) |
申请公布日期 |
1972.07.25 |
| 申请号 |
USD3678889 |
申请日期 |
1971.02.08 |
| 申请人 |
TOKYO SHIBAURA ELECTRIC CO. LTD. |
发明人 |
YOSHIO MURAKAMI;TAKASI YAMAZAKI |
| 分类号 |
C23C14/24;C23C14/52;(IPC1-7):C23C13/08 |
主分类号 |
C23C14/24 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
