| 摘要 |
The invention relates to a unit for processing wafers which comprises several production units (2) and measuring units (3), as well as a transport system for transporting the wafers. Each of said production units (2) and measuring units (3) has a recording unit, with which the input and output of wafers to the respective production unit (2), or measuring unit (3) can be recorded, in order to determine the occupancy of the said units by wafers. Depending upon said occupancy, the input or output requirement of each production unit (2) or measuring unit (3) may be generated.
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