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发明名称
Lichtbogen-Verdampfungsvorrichtung
摘要
申请公布号
DE4223592(C2)
申请公布日期
2001.05.17
申请号
DE19924223592
申请日期
1992.07.17
申请人
BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG
发明人
HOVSEPYAN, PAPKEN;HENSEL, BERND
分类号
C23C14/32;H01J37/32;H05B7/18;(IPC1-7):C23C14/22
主分类号
C23C14/32
代理机构
代理人
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