Mass flow sensor comprises a frame, a membrane held by the frame, a metal layer, a heating element, a temperature measuring element and a moisture barrier arranged above the metal layer

摘要

Mass flow sensor comprises a frame (6) formed partially by silicon; a membrane (24) held by the frame; a metal layer (10) arranged above the frame; a heating element formed by a first structure in the metal layer; and at least one temperature measuring element formed by a second structure in the metal layer. A moisture barrier (13) is arranged above the metal layer. Preferred Features: The moisture barrier is formed partially by a nitride layer, preferably a silicon nitride layer. The moisture barrier layer is formed partially by an upper sandwich system with a silicon oxide layer and a silicon nitride layer. The sandwich system has at least one silicon carbide layer.