GAS FLOW CONTROL IN A SUBSTRATE PROCESSING SYSTEM,申请号EP19990933994-传众专利搜索

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发明名称	GAS FLOW CONTROL IN A SUBSTRATE PROCESSING SYSTEM
摘要
申请公布号	EP1099241(A2)	申请公布日期	2001.05.16
申请号	EP19990933994	申请日期	1999.07.13
申请人	AKT, INC.;BLONIGAN, WENDELL T.	发明人	BLONIGAN, WENDELL, T.;WHITE, JOHN, M.;RICHTER, MICHAEL, W.
分类号	C23C16/455;H01L21/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/00	主分类号	C23C16/455
代理机构		代理人
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地址

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