SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PURPOSE: A semiconductor manufacturing apparatus is provided to improve uniformity and the efficiency of the maintenance works and to easily adjust the position between a tube and a boat cover. CONSTITUTION: A vertical furnace for use in a semiconductor manufacturing apparatus comprises a heater(4), an outer tube(1), an inner tube(3), a boat(19) adapted to be introduced into the inner tube with a wafer loaded thereon, and a boat cover(20) disposed internally of the inner tube concentrically therewith. The boat cover(20) is comprised of a boat cover body and an auxiliary cover plate connected to the boat cover body with a given gap therebetween. The boat cover body has a predetermined number of slit apertures extending in a generator direction thereof. The auxiliary cover plate is disposed to cover the slit apertures.