| 摘要 |
The present invention provides improved apparatus and process for the dilution and delivery of both high-purity chemicals as well as slurry chemicals from one or more bulk sources to an end-user. The present system utilizes two or more metered vessels (2a, 2b) which are connected to bulk chemical sources (3a, 3b) via intake lines (la, lb). Each metered vessel (2a, 2b) contains an adjustable, swingable angle pipe (25a, 25b), which drains any excess chemical by gravity flow from the metered vessel (2a, 2b) so as to adjust the chemical amount to a predetermined desired level. As the chemicals exit the angle pipes (25a, 25b), sensors (103) located at the end of the angle pipes sense the chemical being discharged and trigger the feed pump and valve (7a, 7b) to shut off, whereby the excess chemicals will continue to drain out until the chemical levels reach the same level as the vent port of the pipe attached to the metered vessels. The chemicals are drawn into the metered vessels (2a, 2b) from the bulk sources (3a, 3b) via a feed pump or pressure mechanism. The chemicals are then motivated through dispense lines (9a, 9b) to the pressure tank vessel (10) for mixing and subsequently being delivered to a storage vessel which, in the case of CMP, may be replaced by a plurality of small diameter vessels to reduce slurry particle agglomeration. <IMAGE> |
