| 摘要 |
The invented thin film actuated mirror array for use in optical projection systems comprises a switching matrix (102), an array (103) of M times N pairs of supporting members (104), and another array (105) of M times N actuating structures (106), wherein the switching matrix includes a substrate (110) of insulating material, each pair of the supporting members (104) is made of insulating material and wherein each actuating structure (106) contains a reflecting layer (107), an elastic layer (108) of insulating material and an electrodisplacive layer (109) of piezoelectric material. On the substrate (110) top surface (111) there is printed a first, a second and a third conduction line patterns (112, 113, 114), whereby the first and the second lines of the conduction line patterns (112, 113) are connected for transmission of a video signal and a driving signal to an external source and the third conduction line pattern (114) forms a line of the video signal to each actuating structure (106), each supporting member (104) is placed on upper side of the second and the third lines of the conduction line patterns (113, 114), each actuating structure (106) further comprises a first, a second, a central a third and a fourth tabs (115, 116, 117, 118 and 119) being separated from each other by a gap (120) in-between, each of the actuating structures (106) still further includes a pair of actuators (121) and a pair of gate actuators (122) having a proximal and a distal ends (123, 124), whereby each of the gate actuators (122) is cantilevered from each of the supporting members (104) by the proximal end (123) thereof. Each of the gate actuators (122) is further provided with an insulating layer (129) attached to bottom thereof at the distal end (124) and a contact layer attached to bottom of the insulating layer (129).
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