| 摘要 |
The invented array (50) of M times N actuated mirrors (51) comprises an active matrix (52), an array of M times N elastic members (54), an array of M times N pairs of actuating structures (57), an array of M times N mirrors (62), and an array of M times A pairs of supporting members (60). Each of the elastic members (60) is provided with a distal (67) and a proximal (68) ends, the proximal end (68) including a first (71) and a second (72) tab portions, the first tab (71) and the second tab (72) portions being separated by a retraction (73) therebetween, the distal end (67) including a protrusion (74), whereby the protrusion (74) from each of the elastic members (54) extends into the retraction (73) of a successive elastic member (54) in the array. Each of the actuating structures (57) is located on the first and the second tab portions (71 and 72) on each of the elastic members (54), respectively, whereby each of the actuating structures (57) includes a bias electrode (77) and a signal electrode (76) and a motion-inducing thin film layer (75) introduced therebetween. The manufacturing process according to the present invention comprises providing an active matrix having a top surface, the active matrix including a substrate, an array of M times N transistors and an array of M times N pairs of connecting terminals on the top surface thereof, further forming a sacrificial layer on the top surface of the active matrix, removing the sacrificial layer surrounding each of the connecting terminals, forming a supporting member around each of the connecting terminals, depositing an elastic layer on top of the sacrificial layer and supporting members, forming an array of M times N pairs of conduits, providing an array of M times N pairs of signal electrodes on top of the elastic layer, forming a motion-inducing thin film layer on top of each of the signal electrodes, depositing a layer made of an electrically conducting light reflecting material on top of the motion inducing and elastic layers to thereby form a semifinished array of actuated mirror structures, and patterning the semifinished array of actuated mirror structures into an array of M times N actuated mirror structures.
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