发明名称 |
Spectrometer objective for particle beam measuring system |
摘要 |
<p>Spectrometer objective for a particle beam measuring system with an objective lens and a retarding field spectrometer which form a particle beam optical unit for focussing a primary particle beam, wherein the retarding field spectrometer comprises an extraction electrode arrangement for extracting secondary particles from a specimen, an acceleration electrode arrangement for accelerating the secondary particles in the direction of the objective lens, a retarding field electrode arrangement for establishing a potential barrier which retards the secondary particles and means for charging the first electrode arrangement with at least two different voltages for adjustment of the extraction field strength. Furthermore, there are means for charging the acceleration electrode arrangement dependent on the voltage of the extraction electrode arrangement to form a secondary particle bundle being adapted for passing the retarding field electrode arrangement.</p> |
申请公布号 |
EP1100112(A1) |
申请公布日期 |
2001.05.16 |
申请号 |
EP19990122582 |
申请日期 |
1999.11.12 |
申请人 |
ADVANTEST CORPORATION |
发明人 |
KINTAKA, AKIRA;SEYAMA, MASAHIRO;FROSIEN, JUERGEN, DR. |
分类号 |
H01J37/244;H01J37/141;G02B27/10;H01J37/10;H01J37/252;(IPC1-7):H01J49/46;H01J49/48;G01R31/305 |
主分类号 |
H01J37/244 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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