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发明名称
COMPOSITION AND METHOD FOR POLISHING A COMPOSITE COMPRISING TITANIUM
摘要
申请公布号
EP0985059(A4)
申请公布日期
2001.05.16
申请号
EP19980911675
申请日期
1998.03.16
申请人
RODEL, INC.
发明人
WANG, JIUN-FANG;SETHURAMAN, ANANTHA, R.;COOK, LEE, MELBOURNE
分类号
C09G1/02;C09K3/14;C23F3/00;H01L21/304;H01L21/321;(IPC1-7):C23F1/14;H01L21/306
主分类号
C09G1/02
代理机构
代理人
主权项
地址
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