USE OF TAPERED SHADOW CLAMP RING TO PROVIDE IMPROVED PHYSICAL VAPOR DEPOSITION SYSTEM

摘要

PURPOSE: Use of tapered shadow clamp ring to provide an improved physical vapor deposition system is provided to clamp and shield the edge parts of a substrate useful for producing an electronic device. CONSTITUTION: By the expansion of the inside diameter of the upper face of an almost annularly formed clamp ring(30), a shadow ring is formed. This shadow ring part is bulged over the upper face of a substrate which has been treated but is not brought into contact with it. A smoothly tapered substrate contact face(58) elongating from the width of the outer diameter of the bottom face of the shadow ring to the bottom face of the clamp ring is formed and is configured so as to be engaged with the outside edges of the substrate. The substrate contact face(58) aligns the clamp ring with a substrate supporting member, and as the substrate is vertically raised, it aligns the substrate(12) with the substrate supporting member and the clamp ring(30).