| 摘要 |
PURPOSE: To provide a vacuum micro device capable of narrowing an electron orbit without using a control electrode. CONSTITUTION: A vacuum micro device comprises three electrodes, i.e., a cathode 1 having an electron emission layer 7, a gate electrode 1 having an opening 6 for passing an electron emitted from the electron emission layer, and a cathode 9 formed over the gate electrode. The vacuum micro device may prevent electron having a large velocity component parallel with a face of the electron emission layer 7 from passing the opening and may narrow an orbit of the electron passing the opening, by making the shortest distance L until which the electron emitted from the electron emission layer passes the opening, larger than a thickness S of the opening.
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