MICRO ACTUATOR AND HEAD SUSPENSION ASSEMBLY OF DISK DRIVE USING THE SAME AND FABRICATING METHOD THEREOF

摘要

PURPOSE: A micro actuator and a head suspension assembly of a disk drive using the same and a fabricating method thereof are to simplify a structure of the actuator to be driven with low power, thereby reducing a size of the assembly and fabricating cost. CONSTITUTION: In the actuator, a driving member(52) is disposed around a base member to be installed in a desired track direction with respect to the base member. A leaf spring(55) is respectively connected to the driving member and the base member to be compressed and released in the track direction. A magnetic portion generates magnetic force between the driving member and the base member to finely move the driving member in the track direction. The driving member is fined moved by the magnetic force, while compressing/releasing the leaf spring. In the magnetic portion, the firs magnetic core is disposed at the driving member. The second magnetic core(71) is disposed to be oppositely apart from the firs magnetic core. A magnetic coil is wound around an outer surface of the first and second magnetic core to generate magnetic force when power is applied. The driving member has a pair of first silicon substrates which are coupled to the first magnetic core to enclose the first magnetic core.