发明名称 |
Two-piece clamp ring for holding semiconductor wafer or other workpiece |
摘要 |
A clamp ring assembly for securing a generally circular workpiece to a supporting surface comprises an annular base ring having a radial inner surface of a predetermined diameter and at least one locking member. The base ring further includes at least one opening extending axially therethrough for securing the base ring to the supporting surface. An annular securing ring having a radial outer surface and a radial inner surface is provided. The diameter of the outer surface of the securing ring is the same as or slightly smaller than the diameter of the inner surface of the base ring and the securing ring includes at least one locking member for engaging the locking member of the base ring when the securing ring is assembled with the base ring. The securing ring also includes at least one workpiece engaging member for engaging and holding the workpiece against the supporting surface.
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申请公布号 |
US6231038(B1) |
申请公布日期 |
2001.05.15 |
申请号 |
US19990447771 |
申请日期 |
1999.11.23 |
申请人 |
GREENE TWEED OF DELAWARE, INC. |
发明人 |
KEYSER WILLIAM;MURPHY KENNETH;EDWARDS TIMOTHY |
分类号 |
H01L21/683;H01L21/00;H01L21/687;(IPC1-7):B25B1/20 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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