| 摘要 |
PURPOSE: A casein solution is provided, which has a good antisepsis property and a prevention-of-mold property, and also has good preservation stability and workability, and does not hinder a sensitivity and a resolution of a corresponding resist material when it is used as the resist material. CONSTITUTION: The casein solution contains an isothiazole compound(A element) and a benzoisothiazole compound(B element). As to 100 wt% of casein solution, the element is 0.001-0.2 wt% and the B element is 0.003-0.4 wt%. The An element is 5-chloro-2-methyl-3-isothiazole and/or 4-chloro-2-methyl-3-isothiazole, and also the B element is 1,2-benzoisothiazole. The casein solution further includes one kind or several kinds of water-soluble organic solvent, which is an ethylene glycol or a propylene glycol. And a pH of the casein solution is 7.0-9.0. |
