| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum filter preventing the adhesion of dust to a work. SOLUTION: A first element member 37a for filtering air, a second element member 37b and a filter element 31 with a frame are housed in the space 15 of an element housing body 12 and a first port 17 and a second port 29 both of which communicate with the space 15 are provided to the element housing body 12 and a bidirectional check valve 41 for determining an air flow is provided to the space 15. At a time of the generation of a vacuum, air flows to the first port 17 from the second port 29 through the first element member 37a. At a time of vacuum break, air flows to the second port 29 from the first port 17 through the second element member 37b.
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