SF6 GAS RECOVERY APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an SF6 gas recovery apparatus not discharging SF6 gas to the atmosphere at all even if there is a slight amount of the SF6 gas not perfectly separated in a process for separating the SF6 gas from other mixed gas in a gas separation process in recovering the SF6 gas in a container to be recovered. SOLUTION: In a process for separating SF6 gas from other mixed gas in a gas separation part 21, exhaust gas wherein a slight amount of the SF6 gas is present along with mixed gas is once stored in the exhaust gas tank 6 in the gas separation part 21 through an exhaust gas inlet 20 and subsequently again refluxed to a container 26 to be recovered through an exhaust gas outlet 2.