| 摘要 |
PROBLEM TO BE SOLVED: To provide a filament for vapor deposition which is small in deformation or corrosion and less easily generates defects in a work to be vapor- deposited, and its deposition method. SOLUTION: The tungsten filament 1 for vapor deposition comprises at least one tungsten wire containing no dopant and at least one dope tungsten which are twisted with each other.
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