APPARATUS FOR DRIVING MICRO-MIRROR

摘要

PURPOSE: An apparatus for driving a micro-mirror is provided to reduce the time for shifting the state of the micro-mirror by improving an electrode structure. CONSTITUTION: The device includes a substrate(21). An address electrode(30) is installed on the substrate(21). The micro-mirror(51) is spaced from the substrate(21) with arranged opposingly to the substrate (21). The inclination of the micro-mirror(51) is adjusted by an electrostatic force between the address electrode(30) and the micro-mirror(51). An auxiliary electrode(40) is protruded from the substrate(21). The auxiliary electrode(40) is positioned at a periphery of the micro-mirror(51). When the micro-mirror(51) is returned to the initial position thereof, the restoring force of the micro-mirror(51) is increased by the electrostatic force of the auxiliary electrode(40).