| 摘要 |
PROBLEM TO BE SOLVED: To provide a dicing machine capable of executing an accurate kerf check, a method for checking its kerf and a kerf checking system. SOLUTION: A twin spindle dicer having a first blade 20A and a second blade 20B cuts an uncut street S5 by the blade 20A, cuts an uncut street S6 by the blade 20B, and kerf checks the cut grooves g5, g6. According to this method, since the groove g6 formed of the blade 20B is not superposed on the groove g5 formed of the blade 20A, both he blades can be accurately kerf checked. |
